SmartLab Vacuum Magnetron Spray System

Vacuum spraying system is high-tech equipment for coatings from various conductive materials by magnetron sputtering by direct current and high frequency. System consists of vacuum chamber in which spraying units are located. In the lower part there is a substrate holder, on which parts for spraying are fixed. In the side of the camera there is an IR heater, which, with the help of a programmable logic controller (PLC), maintains temperature displayed on the controller screen.

The magnetrons are fed with a signal from DC power supplies. Targets l are sprayed onto substrate fixed in the substrate holder. System allows to spray the material with one or two targets. It is possible to apply different materials layer by layer. As targets, discs made of metals, precision metals, composite conductive materials can be used. The design of the magnetron involves usage of targets with diameter of 50 mm. Pumping system is connected to vacuum chamber. Sputtering occurs at a pressure of 1х10-5 mbar. In the process of spraying, argon gas is used for high purity in accordance with TU 2114-005-00204760-99. All operating parameters are shown in Table 1.

Table 1 - Operating parameters of a vacuum deposition system

Working pressure in the chamber

1х10-5 mbar

Maximum temperature in the chamber

150 ºС

Working environment in the chamber

Argon gas

Diameter of the target

50 mm

Possibility of moving the substrate holder

Automated movement along the Z axis and simultaneous rotation at 3600

Possible sputtering materials

Cr, Ni, Cu *

Possible substrate materials

Optical fibers**, optical parts, metal products, ceramics

Maximum dimensions of the substrate

80х80х100 mm

Maximum thickness of applied film

1 μm

Monitoring of applied film

Visual control of the applied coating is carried out by using Levenhuk510 microscope

* It is possible to apply other conductive materials as agreed.

** For optical fibers, one-time loading  can be up to 10 pcs with recoating portion of 10 mm.

*** It is possible to conduct X-ray spectral analysis of the applied coating (determination of macro- and microcomposition, construction of spatial maps of distribution of coating elements).